The aim of NanoMet is to develop a dimensional metrological system that will be non-destructive, cost-effective and capable of recording data in real time. The metrology system will be based on optical non-destructive measurements that will provide real-time information on the critical dimensions and the evolution of the characteristics of the manufactured nanostructured materials. In particular, information on the thickness of the depositing and stamping material as well as the dimensions of the printed structures will be measured in real time. An important element for all the above measurements and for the evaluation of the metrology method is the control of the polymeric imprinting material. For that reason, polymeric materials with certain optical and chemical properties will be designed and developed and will create a database of features that will help in the comprehensive understanding and evaluation of the dimensional metrology platform.